Download CMOS Hotplate Chemical Microsensors (Microtechnology and by Markus Graf,Diego Barrettino,Henry P. Baltes,Andreas PDF

By Markus Graf,Diego Barrettino,Henry P. Baltes,Andreas Hierlemann

this can be the 1st accomplished publication on microhotplate-based chemical sensor structures in CMOS-technology. It covers all points of winning sensor prototyping: concept of transducer modelling, microelectronics layout issues, method layout matters, and concerns on the topic of approach and equipment microfabrication, packaging, and checking out. quite a few various hotplates for various operation stipulations is targeted and a family members of metal-oxide-covered microhotplate-based microsensor structures with expanding complexity is gifted. those platforms belong to a brand new new release of chemical microsensors and symbolize examples of the winning integration of nanomaterials, microtechnology and microelectronics. The booklet presents scholars, scientists and engineers with an available advent to the sector of microhotplate-based chemical sensing, with all of the important basic wisdom incorporated. past that, it additionally offers exact details on all vital matters pertaining to complicated high-performance CMOS chemical microsensor structures; for that reason it's going to even be worthwhile to specialists already conversant in the field.

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