Download Electroceramic-Based MEMS: Fabrication-Technology and by Nava (Ed.) Setter,Nava Setter PDF

By Nava (Ed.) Setter,Nava Setter

The ebook is concentrated at the use of practical oxide and nitride skinny movies to extend performance and alertness diversity of MEMS (microelectromechanical platforms) within the huge feel, together with micro-sensors, micro-actuators, and digital elements for prime frequency communications. The ebook covers significant themes and is split into elements (a) functions and rising purposes, and (b) fabrics, fabrication applied sciences, and functioning issues.

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